JPS63183261U - - Google Patents
Info
- Publication number
- JPS63183261U JPS63183261U JP7423887U JP7423887U JPS63183261U JP S63183261 U JPS63183261 U JP S63183261U JP 7423887 U JP7423887 U JP 7423887U JP 7423887 U JP7423887 U JP 7423887U JP S63183261 U JPS63183261 U JP S63183261U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering device
- bonding
- magnetron sputtering
- plate
- backing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims 2
- 239000007767 bonding agent Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7423887U JPH0516215Y2 (en]) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7423887U JPH0516215Y2 (en]) | 1987-05-18 | 1987-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63183261U true JPS63183261U (en]) | 1988-11-25 |
| JPH0516215Y2 JPH0516215Y2 (en]) | 1993-04-28 |
Family
ID=30919268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7423887U Expired - Lifetime JPH0516215Y2 (en]) | 1987-05-18 | 1987-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516215Y2 (en]) |
-
1987
- 1987-05-18 JP JP7423887U patent/JPH0516215Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516215Y2 (en]) | 1993-04-28 |